Photolithography
Photolithography is a fundamental technique in microfabrication used to transfer intricate patterns onto semiconductor wafers using ultraviolet (UV) light and photosensitive materials (photoresists). It is a key step in the manufacturing of integrated circuits, MEMS, sensors, and microfluidic devices.
Vacuum Thin Film Deposition
A thin film deposition unit is a high-precision system used to deposit layers of materials ranging from a few nanometers to micrometers in thickness onto a substrate. Utilizing methods such as thermal evaporation, sputtering, or chemical vapor deposition, these systems are essential in semiconductor fabrication, photovoltaics, optics, and sensor technology.
Oxidation Furnace
An oxidation furnace is a high-temperature thermal processing system used to grow or modify oxide layers on substrates, commonly in semiconductor and material science applications.
Glove Box
A glove box is a sealed enclosure designed to handle sensitive or hazardous materials in a controlled environment, typically under inert gas (e.g., nitrogen or argon) to prevent contamination from air or moisture.
RIE (Reactive Ion Etching) System
A Reactive Ion Etching (RIE) system is a plasma-based dry etching tool used to precisely pattern materials at the micro- and nanoscale. It combines chemical and physical etching mechanisms to achieve anisotropic etch profiles, essential for advanced semiconductor device fabrication, MEMS, and thin-film processing.
Class 1000 Clean Room
: Funded by UGC-SAP
Organic Chemical Wet Bench
An organic chemical wet bench is a specialized workstation designed for the safe handling and processing of volatile and flammable organic chemicals in a controlled lab environment.
PECVD (Plasma-Enhanced Chemical Vapor Deposition) System
PECVD is a thin-film deposition technique that uses plasma to enhance chemical reactions at lower substrate temperatures. It enables uniform coating of materials such as silicon nitride, silicon dioxide, and amorphous silicon on various substrates.
Quantum Efficiency and IV Measurement System
A Quantum Efficiency and IV Measurement System is a precision instrument used to characterize photovoltaic devices, photodetectors, and solar cells.
Spin Coater Machine
A Spin Coater Machine is a precision tool used to apply uniform thin films onto flat substrates by rapidly spinning them while a solution is dispensed.
Computer Vision and Image Processing Laboratory
Advanced lab for Computer Vision and Image Processing.
