Micro-Fabrication  Facilities

(Funded By: DeiTy, DST, UGC )




MEMS facilities


Reactive ion etching (RIE), Plasma enhanced Chemical vapour deposition (PECVD). Thin film deposition, Photo -lithography, Wet/dry oxidation furnace, Spin coating apparatus, up, Wet chemical bench, DI water plant, Ultrasonic oven etc. 


set up


Thickness and refractive index measurement set, Gas sensing measurement set up. E-nose testing set up, Optical sensor testing and measurement set up etc.  


Central facilities

in Tezpur University


TEM Imaging, Single Crystal XRD, Scanning Electron Microscope (SEM) , Material sample preparation etc.




 Professor Partha Pratim Sahu , Chief Invesitgator

 Professor Manabendra Bhuyan , Co-Chief Invesitgator

 Mr. Biplob Mondal , Co-Chief Invesitgator


 Mr. Mukut Senapati, SRF

 Mr. Milon Hazarika, JRF

 Mr. Palash Phukan, JRF