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Micro-Fabrication Facilities (Funded By: DeiTy, DST, UGC ) |
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MEMS facilities
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Reactive ion etching (RIE), Plasma enhanced Chemical vapour deposition (PECVD). Thin film deposition, Photo -lithography, Wet/dry oxidation furnace, Spin coating apparatus, up, Wet chemical bench, DI water plant, Ultrasonic oven etc. |
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Characterization set up
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Thickness and refractive index measurement set, Gas sensing measurement set up. E-nose testing set up, Optical sensor testing and measurement set up etc.
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Central facilities in Tezpur University
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TEM Imaging, Single Crystal XRD, Scanning Electron Microscope (SEM) , Material sample preparation etc. |
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Peoples
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Faculty Professor Partha Pratim Sahu , Chief Invesitgator Professor Manabendra Bhuyan , Co-Chief Invesitgator Mr. Biplob Mondal , Co-Chief Invesitgator Staff Mr. Mukut Senapati, SRF Mr. Milon Hazarika, JRF Mr. Palash Phukan, JRF |
